4020系列BIRD功率傳感器原理結(jié)構(gòu) 感應(yīng)器把某種形式的能量轉(zhuǎn)換成另一種形式的能量。有兩類:有源的和無(wú)源的。 有源感應(yīng)器能將一種能量形式直接轉(zhuǎn)變成另一種，不需要外接的能源或激勵(lì)源。 無(wú)源感應(yīng)器不能直接轉(zhuǎn)換能量形式，但它能控制從另一輸入端輸入的能量或激勵(lì)能，感應(yīng)器承擔(dān)將某個(gè)對(duì)象或過(guò)程的特定特性轉(zhuǎn)換成數(shù)量的工作。其"對(duì)象"可以是固體、液體或氣體，而它們的狀態(tài)可以是靜態(tài)的，也可以是動(dòng)態(tài)(即過(guò)程)的。對(duì)象特性被轉(zhuǎn)換量化后可以通過(guò)多種方式檢測(cè)。對(duì)象的特性可以是物理性質(zhì)的，也可以是化學(xué)性質(zhì)的。按照其工作原理，它將對(duì)象特性或狀態(tài)參數(shù)轉(zhuǎn)換成可測(cè)定的電學(xué)量，然后將此電信號(hào)分離出來(lái)，送入感應(yīng)器系統(tǒng)加以評(píng)測(cè)或標(biāo)示。適用于半導(dǎo)體的生產(chǎn)和科研領(lǐng)域，讀 數(shù)誤差+/-3% ● 采用液晶背光顯示，可對(duì)正反向功率 及駐波比等進(jìn)行三位半數(shù)字顯示 ● 功率測(cè)試范圍可人工或自動(dòng)設(shè)置，并有 GPIB和RS-232接口供選擇 功率范圍: 100mW-10kW 頻率范圍: 100kHz-2.5GHz 駐波比范圍: 1.0-199.9 讀數(shù)誤差: ±3% 功能: 測(cè)量正反向功率，通過(guò)W和dBm顯示:測(cè)量駐波比及回波損耗，通過(guò)dB顯示; 以及測(cè)量最大最小值 顯示: 三位半液晶背光顯示 工作電源: AC和電池兩種，115/230AC，50/60Hz或8節(jié)1.2V鎳鎘電池 尺寸: 312X309X108mm 接口選項(xiàng): IEEE-488接口或RS-232接口 BIRD(鳥牌)4421功率計(jì) Precision Power Meter for Semiconductor Processing Applications • ±1% uracy - plished through the use of sensors with an automatic frequency compensation scheme, where the error contributions due to directional coupler frequency response characteristics are eliminated. • Wide Dynamic Range - The instrument will meet the full uracy specification over a 35 dB dynamic range. • Excellent Measurement Repeatability - Typically <0.1% • Digital Display - Along with automatic VSWR calculation • Computer Interface - RS-232 and IEEE-488 standard The Bird® Model 4421 is a precision RF power meter that, while originally intended for general purpose laboratory applications where high uracy is required, has found wide eptance in semiconductor processing applications. The product is configured as a system, consisting of the Model 4421 digital display and a precision power sensor selected for the application based upon maximum power and operating frequency. MODEL 4421 MULTIFUNCTION POWER METER Power Range: 100 mW to 25 kW FS Frequency Range : 100 kHz - 1 GHz VSWR Range: 1.0 - 199.9 4020系列BIRD功率傳感器原理結(jié)構(gòu) Functions : Forward and reflected power in W or dBm, VSWR, return loss in dB and min./max. values Overrange : Audible warning when RF power input exceeds 120% of sensor's maximum power range Indication Display: 3 1/2 digit-liquid crystal display with indicator for mode, measurement units, battery condition, programming status, and trend arrows. Switchable backlight. Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride 1.2 V cells (NEDA type 10014) Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H (312 mm x 309 mm x 108 mm) with handle extended 15 7/16" L (392 mm) Weight : 11 lbs. (5 kg.) Interconnects: 1 meter latch-n-lock coiled cable Interfaces: IEEE-488 and RS-232 standard Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm) Required Product: RF Power Sensor essories: Case 4300A215 (page 43) 19" Panel Mount Kit 4421-250 Latch & Lock Case 4421-038
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